MD-Simulations for damping assessment in MEMS resonators
Bahman Daneshian (Structural Analysis, HSU) Recent scientific works show the beneficial use of MEMS resonators in Structural Health Monitoring (SHM) applications. In these applications, silicon micro-resonators allow for high-quality measurements of propagating waves, leading to substantiated conclusions regarding the health state of the investigated engineering structure. The MEMS resonators usually…